021 51012729
info@bbotech.com
蓝宝石外延抛光晶片是超平, 超洁净, 无应力的抛光基片. 这些基片是通过精确的定向和研磨抛光, 晶片之间高度的均匀性. 这些晶片是通过定制和优化设计, 以满足客户的特殊要求和应用.
蓝豆光电拥有蓝宝石衬底及光学窗口产品领先的的加工和生产能力. 我们先进的车间和大批量的生产设备能力包括钻孔, 切割, 成型, 研磨, 抛光, 清洗, 退火和检测. 我们生产的蓝宝石衬底和窗口具有高品质的表面光洁度,平坦度,以及bow,warp和TTV规格.
蓝宝石衬底片的规格:
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Constituent |
Monocrystal Al2O3 with 99.999% purity |
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Crystal quality |
No envelope, bubble, trace, clouds, striaturn, color or scatterer |
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Diameter |
2 Inch |
3 Inch |
4 Inch |
5inch ～ 7inch |
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Thickness |
430±15µm |
550±15µm |
650±20µm |
Specify |
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Orientation |
C- plane (0001) to M-plane (1-100) or A-plane(1 1-2 0) 0.2±0.1° |
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Orientation side length |
16.0±1.0 |
22.0±1.0 |
32.5±1.5 |
Specify |
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Orientation Incline accuracy |
A-plane (1 1-2 0 ) 0° ± 0.3° |
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TTV |
≤10µm |
≤15µm |
≤20µm |
≤30µm |
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BOW |
≤10µm |
≤15µm |
≤20µm |
≤30µm |
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Warp |
≤10µm |
≤15µm |
≤20µm |
≤30µm |
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Front Surface |
Epi-Polished (Ra < 0.2nm) |
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Back Surface |
Fine ground (Ra = 0.5 to 1.2 µm), Epi-Polished (Ra < 0.2nm) |
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Cleaning/packaging |
Class 100 cleanroom cleaning, vacuum packaging removing nitrogen |
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Note |
Custom Specifications are also available per customer's request. |
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